Submicron lithography
The Resource Submicron lithography- Label
- Submicron lithography
- Statement of responsibility
- Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Socity, March 29-30, 1982, Santa Clara, California
- Series statement
- Proceedings of SPIE--the International Society for Optical Engineering
- Series volume
- v. 333
1 Items of the Work Submicron lithography
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.lib.rpi.edu/resource/VRRayAn0quA/" typeof="CreativeWork http://bibfra.me/vocab/lite/Work"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.lib.rpi.edu/resource/VRRayAn0quA/">Submicron lithography</a></span> - <span property="offers" typeOf="Offer"><span property="offeredBy" typeof="Library ll:Library" resource="http://link.lib.rpi.edu/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.lib.rpi.edu/">Rensselaer Libraries</a></span></span></span></span></div>
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.lib.rpi.edu/resource/VRRayAn0quA/" typeof="CreativeWork http://bibfra.me/vocab/lite/Work"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.lib.rpi.edu/resource/VRRayAn0quA/">Submicron lithography</a></span> - <span property="offers" typeOf="Offer"><span property="offeredBy" typeof="Library ll:Library" resource="http://link.lib.rpi.edu/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.lib.rpi.edu/">Rensselaer Libraries</a></span></span></span></span></div>

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Submicron lithography
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