Context

Context of MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China, Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors ; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.] ; supported by, National Natural Science Foundation of China ... [et al.] ; published by, SPIE--the International Society for Optical Engineering
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