Coverart for item
The Resource Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA, Rajeshuni Ramesham, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA, Rajeshuni Ramesham, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

Label
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA
Title
Reliability, testing, and characterization of MEMS/MOEMS
Title remainder
22-24 October 2001, San Francisco, USA
Statement of responsibility
Rajeshuni Ramesham, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series
Series volume
v. 4558
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA, Rajeshuni Ramesham, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]
Label
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Francisco, USA, Rajeshuni Ramesham, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819442864&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1404042'}
Extent
xxvii, 296 p.
Isbn
9780819442864
Other physical details
ill.

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