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The Resource Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A., editors, David Hodul ... (et al.)

Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A., editors, David Hodul ... (et al.)

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Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A.
Title
Rapid thermal annealing/chemical vapor deposition and integrated processing
Title remainder
symposium held April 25-28, 1989, San Diego, California, U.S.A.
Statement of responsibility
editors, David Hodul ... (et al.)
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Subject
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Series statement
Materials Research Society symposium proceedings
Series volume
v. 146
Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A., editors, David Hodul ... (et al.)
Label
Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A., editors, David Hodul ... (et al.)
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Includes bibliographical references
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Dimensions
24 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1210312'}
Extent
xi, 494 p.
Isbn
9781558990197
Lccn
89-39134
Other physical details
ill.

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