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The Resource Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California, Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California, Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Label
Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California
Title
Rapid thermal and integrated processing
Title remainder
10-11 September 1991, San Jose, California
Statement of responsibility
Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Member of
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 1595
Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California, Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Label
Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California, Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publication
Note
'Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991'--P. ix
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Bibliography note
Includes bibliographical references and index
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1229157'}
Extent
ix, 207 p.
Isbn
9780819407269
Lccn
91-67548
Other physical details
ill.

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