Coverart for item
The Resource Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas, Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society

Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas, Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society

Label
Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas
Title
Process, equipment, and materials control in integrated circuit manufacturing III
Title remainder
1-2 October 1997, Austin, Texas
Statement of responsibility
Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 3213
Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas, Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society
Label
Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas, Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society
Publication
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Bibliography note
Includes bibliographical references and index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819426451&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1340975'}
Extent
ix, 270 p.
Isbn
9780819426451
Other physical details
ill.

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