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The Resource Polymers in microlithography : materials and processes, Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi, editors

Polymers in microlithography : materials and processes, Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi, editors

Label
Polymers in microlithography : materials and processes
Title
Polymers in microlithography
Title remainder
materials and processes
Statement of responsibility
Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi, editors
Contributor
Subject
Genre
Member of
Series statement
ACS symposium series,
Series volume
412
Polymers in microlithography : materials and processes, Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi, editors
Label
Polymers in microlithography : materials and processes, Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi, editors
Publication
Note
Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989
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Bibliography note
Includes bibliographical references and indexes
http://library.link/vocab/cover_art
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Dimensions
24 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1187695'}
Extent
xii, 449 p.
Isbn
9780841217010
Lccn
89-17931
Other physical details
ill.

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