Coverart for item
The Resource Optical/laser microlithography VII : 2-4 March 1994, San Jose, California, Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Optical/laser microlithography VII : 2-4 March 1994, San Jose, California, Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Label
Optical/laser microlithography VII : 2-4 March 1994, San Jose, California
Title
Optical/laser microlithography VII
Title remainder
2-4 March 1994, San Jose, California
Statement of responsibility
Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Title variation
Optical/laser microlithography 7
Contributor
Subject
Genre
Member of
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2197
Optical/laser microlithography VII : 2-4 March 1994, San Jose, California, Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Label
Optical/laser microlithography VII : 2-4 March 1994, San Jose, California, Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Publication
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1258291'}
Extent
xiii, 1008 p.
Isbn
9780819414922
Isbn Type
(pbk.)
Lccn
94-65792
Other physical details
ill.

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