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The Resource Optical/laser microlithography III : 7-9 March 1990, San Jose, California, Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

Optical/laser microlithography III : 7-9 March 1990, San Jose, California, Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

Label
Optical/laser microlithography III : 7-9 March 1990, San Jose, California
Title
Optical/laser microlithography III
Title remainder
7-9 March 1990, San Jose, California
Statement of responsibility
Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Member of
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 1264
Optical/laser microlithography III : 7-9 March 1990, San Jose, California, Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Label
Optical/laser microlithography III : 7-9 March 1990, San Jose, California, Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publication
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Bibliography note
Includes bibliographical references and index
http://library.link/vocab/cover_art
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1207940'}
Extent
x, 586 p.
Isbn
9780819403117
Lccn
90-60894
Other physical details
ill.

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