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The Resource Optical/laser microlithography II : 1-3 March 1989, San Jose, California, Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

Optical/laser microlithography II : 1-3 March 1989, San Jose, California, Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

Label
Optical/laser microlithography II : 1-3 March 1989, San Jose, California
Title
Optical/laser microlithography II
Title remainder
1-3 March 1989, San Jose, California
Statement of responsibility
Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Title variation
  • Optical laser microlithography two
  • Optical laser microlithography 2
Contributor
Subject
Genre
Member of
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 1088
Optical/laser microlithography II : 1-3 March 1989, San Jose, California, Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Label
Optical/laser microlithography II : 1-3 March 1989, San Jose, California, Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publication
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Bibliography note
Includes bibliographies and index
http://library.link/vocab/cover_art
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1186825'}
Extent
viii, 572 p.
Isbn
9780819401236
Isbn Type
(pbk.)
Lccn
89-60658
Other physical details
ill.

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