Coverart for item
The Resource Optical microlithography XVI : 25-28 February 2003, Santa Clara, California, USA, Anthony Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH

Optical microlithography XVI : 25-28 February 2003, Santa Clara, California, USA, Anthony Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH

Label
Optical microlithography XVI : 25-28 February 2003, Santa Clara, California, USA
Title
Optical microlithography XVI
Title remainder
25-28 February 2003, Santa Clara, California, USA
Statement of responsibility
Anthony Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Title variation
Optical Microlithography 16
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
TEF
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series,
Series volume
v. 5040
Optical microlithography XVI : 25-28 February 2003, Santa Clara, California, USA, Anthony Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Label
Optical microlithography XVI : 25-28 February 2003, Santa Clara, California, USA, Anthony Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819448453&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1534247'}
Extent
3 v. (xxxi, 1764 p.)
Isbn
9780819448453
Other physical details
ill. (some col.)

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