Coverart for item
The Resource Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA, Anthon Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH

Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA, Anthon Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH

Label
Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA
Title
Optical microlithography XV
Title remainder
5-8 March, 2002, Santa Clara, [California], USA
Statement of responsibility
Anthon Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 4691
Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA, Anthon Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Label
Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA, Anthon Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Publication
Related Contributor
Related Location
Related Authorities
Related Subjects
Related Items
Bibliography note
Includes bibliographic references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819444370&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1480627'}
Extent
2 v.
Isbn
9780819444370
Lccn
2003268660
Other physical details
ill. (some color)

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