Coverart for item
The Resource Optical microlithography XII : 17-19 March, 1999, Santa Clara, California, Luc Van den Hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH

Optical microlithography XII : 17-19 March, 1999, Santa Clara, California, Luc Van den Hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH

Label
Optical microlithography XII : 17-19 March, 1999, Santa Clara, California
Title
Optical microlithography XII
Title remainder
17-19 March, 1999, Santa Clara, California
Statement of responsibility
Luc Van den Hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH
Title variation
Optical microlithography 12
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 3679
Optical microlithography XII : 17-19 March, 1999, Santa Clara, California, Luc Van den Hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH
Label
Optical microlithography XII : 17-19 March, 1999, Santa Clara, California, Luc Van den Hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819431530&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1383732'}
Extent
2 v. (xiv, 1182 p.)
Isbn
9780819431530
Other physical details
ill.

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