Coverart for item
The Resource Optical microlithography XI : 25-27 February, 1998, Santa Clara, California, Luc Van den hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH

Optical microlithography XI : 25-27 February, 1998, Santa Clara, California, Luc Van den hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH

Label
Optical microlithography XI : 25-27 February, 1998, Santa Clara, California
Title
Optical microlithography XI
Title remainder
25-27 February, 1998, Santa Clara, California
Statement of responsibility
Luc Van den hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Title variation
Optical microlithography 11
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 3334
Optical microlithography XI : 25-27 February, 1998, Santa Clara, California, Luc Van den hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Label
Optical microlithography XI : 25-27 February, 1998, Santa Clara, California, Luc Van den hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819427793&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1353864'}
Extent
xv, 1090 p.
Isbn
9780819427793
Other physical details
ill.

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