Coverart for item
The Resource Optical microlithography VI : 4-5 March 1987, Santa Clara, California, Harry L. Stover, chair/editor

Optical microlithography VI : 4-5 March 1987, Santa Clara, California, Harry L. Stover, chair/editor

Label
Optical microlithography VI : 4-5 March 1987, Santa Clara, California
Title
Optical microlithography VI
Title remainder
4-5 March 1987, Santa Clara, California
Statement of responsibility
Harry L. Stover, chair/editor
Title variation
Optical microlithography 6
Contributor
Subject
Genre
Member of
Series statement
Proceedings of SPIE--the International Society for Optical Engineering
Series volume
v. 772
Optical microlithography VI : 4-5 March 1987, Santa Clara, California, Harry L. Stover, chair/editor
Label
Optical microlithography VI : 4-5 March 1987, Santa Clara, California, Harry L. Stover, chair/editor
Publication
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Bibliography note
Includes bibliographies and index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780892528073&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1163925'}
Extent
vi, 292 p.
Isbn
9780892528073
Isbn Type
(pbk.)
Lccn
87-60740
Other physical details
ill.

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