Coverart for item
The Resource Optical microlithography IX : 13-15 March, 1996, Santa Clara, California, Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH

Optical microlithography IX : 13-15 March, 1996, Santa Clara, California, Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH

Label
Optical microlithography IX : 13-15 March, 1996, Santa Clara, California
Title
Optical microlithography IX
Title remainder
13-15 March, 1996, Santa Clara, California
Statement of responsibility
Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Title variation
Optical microlithography 9
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
MoKL
Illustrations
illustrations
Index
no index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 2726
Optical microlithography IX : 13-15 March, 1996, Santa Clara, California, Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Label
Optical microlithography IX : 13-15 March, 1996, Santa Clara, California, Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Publication
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Bibliography note
Includes bibliographical references and index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819421029&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1337045'}
Extent
2 v. (xii, 914 p.)
Isbn
9780819421029
Lccn
95072315
Other physical details
ill.

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