Coverart for item
The Resource Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas, Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas, Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Label
Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas
Title
Optical characterization techniques for high-performance microelectronic device manufacturing III
Title remainder
16-17 October 1996, Austin, Texas
Statement of responsibility
Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2877
Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas, Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Label
Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas, Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1337367'}
Extent
ix, 218 p.
Isbn
9780819422750
Lccn
96069472
Other physical details
ill.

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