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The Resource Optical Microlithography V, (electronic resource)

Optical Microlithography V, (electronic resource)

Label
Optical Microlithography V
Title
Optical Microlithography V
Language
eng
Member of
Series statement
SPIE proceedings series,
Series volume
v.0633
Optical Microlithography V, (electronic resource)
Label
Optical Microlithography V, (electronic resource)
Link
http://libproxy.rpi.edu/login?url=http://proceedings.spiedigitallibrary.org/volume.aspx?volume=0633
Publication
Note
Proceedings
Related Items
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Dimensions
unknown
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b4215303'}
Isbn
9780892526680
Specific material designation
remote

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