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The Resource Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG, Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering

Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG, Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering

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Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG
Title
Nanofabrication technologies and device integration
Title remainder
13-14 April 1994, Lindau, FRG
Statement of responsibility
Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering
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Series statement
  • EurOpt series
  • SPIE proceedings series
Series volume
v. 2213
Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG, Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering
Label
Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG, Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1258157'}
Extent
ix, 334 p.
Isbn
9780819415172
Isbn Type
(pbk.)
Lccn
94-65766
Other physical details
ill.

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