Coverart for item
The Resource Multilevel interconnect technology : 1-2 October 1997, Austin, Texas, Divyesh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society

Multilevel interconnect technology : 1-2 October 1997, Austin, Texas, Divyesh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society

Label
Multilevel interconnect technology : 1-2 October 1997, Austin, Texas
Title
Multilevel interconnect technology
Title remainder
1-2 October 1997, Austin, Texas
Statement of responsibility
Divyesh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 3214
Multilevel interconnect technology : 1-2 October 1997, Austin, Texas, Divyesh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Label
Multilevel interconnect technology : 1-2 October 1997, Austin, Texas, Divyesh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Publication
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1340979'}
Extent
vii, 132 p.
Isbn
9780819425461
Other physical details
ill.

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