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The Resource Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida, O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor : The Metallurgical Society

Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida, O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor : The Metallurgical Society

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Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida
Title
Modern optical characterization techniques for semiconductors and semiconductor devices
Title remainder
26-27 March 1987, Bay Point, Florida
Statement of responsibility
O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor : The Metallurgical Society
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Series statement
Proceedings of SPIE--the International Society for Optical Engineering
Series volume
v. 794
Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida, O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor : The Metallurgical Society
Label
Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida, O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating sponsor : The Metallurgical Society
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Bibliography note
Includes bibliographical references and index
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Dimensions
28 cm.
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Extent
vi, 282 p.
Isbn
9780892528295
Isbn Type
(pbk.)
Lccn
87-61007
Other physical details
ill.

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