Coverart for item
The Resource Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany, Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany, Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

Label
Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany
Title
Microsystems engineering
Title remainder
metrology and inspection : 20-21 June 2001, Munich, Germany
Statement of responsibility
Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)
Title variation
Metrology and inspection
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series
Series volume
v. 4400
Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany, Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)
Label
Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany, Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1430258'}
Extent
v, 176 p.
Isbn
9780819440952
Other physical details
ill.

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