Coverart for item
The Resource Micron and Submicron Integrated Circuit Metrology, (electronic resource)

Micron and Submicron Integrated Circuit Metrology, (electronic resource)

Label
Micron and Submicron Integrated Circuit Metrology
Title
Micron and Submicron Integrated Circuit Metrology
Language
eng
Member of
Series statement
SPIE proceedings series,
Series volume
v.0565
Micron and Submicron Integrated Circuit Metrology, (electronic resource)
Label
Micron and Submicron Integrated Circuit Metrology, (electronic resource)
Link
http://libproxy.rpi.edu/login?url=http://proceedings.spiedigitallibrary.org/volume.aspx?volume=0565
Publication
Note
Proceedings
Related Items
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780892526000&userID=ebsco-test&password=ebsco-test
Dimensions
unknown
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b4215241'}
Isbn
9780892526000
Specific material designation
remote

Library Locations

    • Folsom LibraryBorrow it
      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
Processing Feedback ...