Coverart for item
The Resource Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA, Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA, Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

Label
Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA
Title
Micromachining technology for micro-optics and nano-optics
Title remainder
28-29 January 2003, San Jose, California, USA
Statement of responsibility
Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Contributor
Subject
Genre
Language
eng
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Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series,
Series volume
v. 4984
Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA, Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Label
Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA, Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Publication
Note
Earlier conference has title: Micromachining technology for micro-optics
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1478361'}
Extent
xlii, 262 p.
Isbn
9780819447845
Other physical details
ill.

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