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The Resource Micromachining of a pressure sensor: KOH etching of a thin silicon membrane and anodic bonding to Pyrex

Micromachining of a pressure sensor: KOH etching of a thin silicon membrane and anodic bonding to Pyrex

Label
Micromachining of a pressure sensor: KOH etching of a thin silicon membrane and anodic bonding to Pyrex
Title
Micromachining of a pressure sensor: KOH etching of a thin silicon membrane and anodic bonding to Pyrex
Creator
Contributor
Dissertation note
Thesis (master's)--Rensselaer Polytechnic Institute, May, 1994.
Micromachining of a pressure sensor: KOH etching of a thin silicon membrane and anodic bonding to Pyrex
Label
Micromachining of a pressure sensor: KOH etching of a thin silicon membrane and anodic bonding to Pyrex
Publication
Related Contributor
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1253628'}
Extent
69 p.
Other physical details
ill.

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      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
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