Coverart for item
The Resource Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas, Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories

Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas, Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories

Label
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
Title
Micromachining and microfabrication process technology II
Title remainder
14-15 October, 1996, Austin, Texas
Statement of responsibility
Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
DLC
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings / SPIE--the International Society of Optical Engineering
Series volume
v. 2879
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas, Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories
Label
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas, Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1338271'}
Extent
ix, 366 p.
Isbn
9780819422774
Lccn
96069473
Other physical details
ill.

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