Coverart for item
The Resource Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

Label
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
Title
Micromachining and microfabrication process technology VI
Title remainder
18-20 September 2000, Santa Clara, USA
Statement of responsibility
Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series
Series volume
v. 4174
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Label
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1389243'}
Extent
x, 524 p.
Isbn
9780819438300
Other physical details
ill.

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