Coverart for item
The Resource Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California, James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California, James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Label
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
Title
Micromachining and microfabrication process technology IV
Title remainder
21-22 September, 1998, Santa Clara, California
Statement of responsibility
James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 3511
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California, James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Label
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California, James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819429704&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1355824'}
Extent
xi, 402 p.
Isbn
9780819429704
Other physical details
ill.

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