Coverart for item
The Resource Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas, Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas, Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology

Label
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
Title
Micromachining and microfabrication process technology III
Title remainder
29-30 September, 1997, Austin, Texas
Statement of responsibility
Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CU-S
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 3223
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas, Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology
Label
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas, Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology
Publication
Related Contributor
Related Location
Related Agents
Related Authorities
Related Subjects
Related Items
Bibliography note
Includes bibliographical references and index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819426550&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1347886'}
Extent
ix, 310 p.
Isbn
9780819426550
Lccn
98122577
Other physical details
ill.

Library Locations

    • Folsom LibraryBorrow it
      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
Processing Feedback ...