Coverart for item
The Resource Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA, Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]

Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA, Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]

Label
Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA
Title
Micromachining and microfabrication process technology VII
Title remainder
22-24 October, 2001, San Francisco, [California] USA
Statement of responsibility
Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 4557
Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA, Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]
Label
Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA, Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]
Publication
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Bibliography note
Includes bibliographic references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819442857&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1404257'}
Extent
x, 486 p.
Isbn
9780819442857
Lccn
2002265337
Other physical details
ill.

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