Coverart for item
The Resource Micromachined devices and components III : 29 September 1997, Austin, Texas, Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology

Micromachined devices and components III : 29 September 1997, Austin, Texas, Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology

Label
Micromachined devices and components III : 29 September 1997, Austin, Texas
Title
Micromachined devices and components III
Title remainder
29 September 1997, Austin, Texas
Statement of responsibility
Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology
Title variation
Micromachined devices and components 3
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CU-S
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series ; v. 3224
Micromachined devices and components III : 29 September 1997, Austin, Texas, Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology
Label
Micromachined devices and components III : 29 September 1997, Austin, Texas, Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819426567&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1347894'}
Extent
ix, 382 p.
Isbn
9780819426567
Lccn
98122098
Other physical details
ill.

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