Coverart for item
The Resource Micromachined devices and components : 23-24 October, 1995, Austin, Texas, Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering

Micromachined devices and components : 23-24 October, 1995, Austin, Texas, Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering

Label
Micromachined devices and components : 23-24 October, 1995, Austin, Texas
Title
Micromachined devices and components
Title remainder
23-24 October, 1995, Austin, Texas
Statement of responsibility
Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Member of
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2642
Micromachined devices and components : 23-24 October, 1995, Austin, Texas, Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering
Label
Micromachined devices and components : 23-24 October, 1995, Austin, Texas, Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering
Publication
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Bibliography note
Includes bibliographic references and author index
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1326575'}
Extent
ix, 296 p.
Isbn
9780819420084
Lccn
95-70377
Other physical details
ill.

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