Coverart for item
The Resource Microlithography and metrology in micromachining II : 14-15 October, 1996, Austin, Texas, Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology

Microlithography and metrology in micromachining II : 14-15 October, 1996, Austin, Texas, Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology

Label
Microlithography and metrology in micromachining II : 14-15 October, 1996, Austin, Texas
Title
Microlithography and metrology in micromachining II
Title remainder
14-15 October, 1996, Austin, Texas
Statement of responsibility
Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CU-S
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2880
Microlithography and metrology in micromachining II : 14-15 October, 1996, Austin, Texas, Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
Label
Microlithography and metrology in micromachining II : 14-15 October, 1996, Austin, Texas, Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
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Bibliography note
Includes bibliographic references and index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819422781&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1338269'}
Extent
ix, 296 p.
Isbn
9780819422781
Lccn
96069474
Other physical details
ill.

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