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The Resource Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas, Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering

Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas, Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering

Label
Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas
Title
Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications
Title remainder
24 October, 1995, Austin, Texas
Statement of responsibility
Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering
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Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2641
Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas, Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering
Label
Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas, Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International ... (et al.), published by SPIE--the International Society for Optical Engineering
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Bibliography note
Includes bibliographic references and author index
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1326585'}
Extent
v, 154 p.
Isbn
9780819420077
Lccn
95-70376
Other physical details
ill.

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