Coverart for item
The Resource Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California, M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California, M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Label
Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California
Title
Microelectronic structures and MEMS for optical processing IV
Title remainder
21-22 September, 1998, Santa Clara, California
Statement of responsibility
M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings of SPIE,
Series volume
v. 3513
Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California, M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Label
Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California, M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International ... [et al.]
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819429728&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1355776'}
Extent
vii, 240 p.
Isbn
9780819429728
Other physical details
ill.

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