Coverart for item
The Resource Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas, M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for OPtical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology ; published by SPIE--the International Society for Optical Engineering

Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas, M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for OPtical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology ; published by SPIE--the International Society for Optical Engineering

Label
Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas
Title
Microelectronic structures and MEMS for optical processing III
Title remainder
29-30 September, 1997, Austin, Texas
Statement of responsibility
M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for OPtical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology ; published by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 3226
Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas, M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for OPtical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology ; published by SPIE--the International Society for Optical Engineering
Label
Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas, M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for OPtical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology ; published by SPIE--the International Society for Optical Engineering
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Bibliography note
Includes bibliographic references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819426581&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1340931'}
Extent
v, 214 p.
Isbn
9780819426581
Other physical details
ill.

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