Coverart for item
The Resource Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas, Ih-chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas, Ih-chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

Label
Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas
Title
Microelectronic device and multilevel interconnection technology II
Title remainder
16-17 October, 1996, Austin, Texas
Statement of responsibility
Ih-chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
MoKL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2875
Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas, Ih-chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
Label
Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas, Ih-chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
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Bibliography note
Includes bibliographic references and author index
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1338273'}
Extent
viii, 392 p.
Isbn
9780819422736
Lccn
96069470
Other physical details
ill.

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