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The Resource Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

Label
Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
Title
Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
Creator
Subject
Language
eng
Member of
Cataloging source
MiAaPQ
Literary form
non fiction
Nature of contents
dictionaries
Series statement
Springer Theses Ser
Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
Label
Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
Link
http://libproxy.rpi.edu/login?url=https://ebookcentral.proquest.com/lib/rpi/detail.action?docID=4182843
Publication
Copyright
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Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
  • Supervisor's Foreword -- Abstract -- Acknowledgments -- Contents -- Abbreviations -- 1 Introduction -- Abstract -- 1.1 Micro-Nanohierarchical Structures in Nature -- 1.2 Artificial Micro-Nanohierarchical Structures -- 1.2.1 The Progress of Bottom-Up Method -- 1.2.2 The Progress of Top-Down Method -- 1.3 The Development Progress of Microenergy Field -- 1.3.1 Microenergy Technology -- 1.3.2 Nanogenerator -- 1.3.3 Triboelectric Nanogenerator -- 1.4 Research Purpose and Content -- 1.4.1 Research Purpose -- 1.4.2 Research Content -- References -- 2 Micro-Nanointegrated Fabrication Technique for Silicon -- Abstract -- 2.1 Nanoforest Fabrication Based on an Improved DRIE Process -- 2.1.1 Deep Reactive-Ion Etching (DRIE) Process -- 2.1.2 Nanostructuring by an Improved DRIE Process -- 2.1.3 Mechanism of Controllable Formation of Nanostructures -- 2.2 Fabrication of Si-based Micro-Nanohierarchical Structures -- 2.2.1 Structural Design -- 2.2.2 Fabrication Process -- 2.2.3 Characterization and Analysis of Micro-NanoHierarchical Structures -- 2.3 Interaction of Multiscale Structures Based on Silicon -- 2.4 Properties of Si-Based Micro-NanoHierarchical Structures -- 2.4.1 Anti-reflective Property -- 2.4.2 Super-hydrophobic Property -- 2.5 Conclusions -- References -- 3 Micro-Nanointegrated Fabrication Technique for Flexible Materials -- Abstract -- 3.1 Replication Process and Surface-Energy Control -- 3.1.1 Replication Process Based on Silicon Mold -- 3.1.2 Controllable Fabrication of Ultra-Low-Surface-Energy Silicon Mold -- 3.2 Micro-Nanohierarchical Structures Based on PDMS -- 3.2.1 Brief Introduction of PDMS -- 3.2.2 Single-Step Fabrication of Micro-Nanohierarchical Structures on PDMS -- 3.2.3 Key Factors of Single-Step Replication Process -- 3.2.4 Effect of Process Parameters on Surface Properties of PDMS
  • 3.3 Micro-Nanohierarchical Structures Based on Parylene-C -- 3.3.1 Fabrication and Method -- 3.3.2 The Properties of Fabricated MNHS Parylene-C Films -- 3.4 The Interaction of Multiscale Structures on Flexible Materials -- 3.5 The Surface Modification Based on Post-DRIE Process -- 3.5.1 Fluorocarbon Plasma Treatment Based on Post-DRIE Process -- 3.5.2 The Mechanism of Enhancing Hydrophobicity by Using Post-DRIE Process -- 3.6 Conclusions -- References -- 4 Flexible Triboelectric Nanogenerators: Principle and Fabrication -- Abstract -- 4.1 Working Principle of TENG -- 4.2 Design of Flexible Sandwich-Shaped TENG -- 4.2.1 Structural Geometry and Surface Profile -- 4.2.2 Theoretical Analysis -- 4.2.3 Finite Element Simulation -- 4.3 Fabrication of the Sandwich-Shaped TENG -- 4.4 Electric Properties Test and Analysis of the Sandwich-Shaped TENG -- 4.4.1 Test System and Brief Results -- 4.4.2 Frequency Effect of External Force on TENG -- 4.4.3 Structural Effect on TENG -- 4.4.4 Powering Ability for Practical Applications -- 4.5 Conclusions -- References -- 5 Flexible Triboelectric Nanogenerators: Enhancement and Applications -- Abstract -- 5.1 Enhancement of TENG Based on Single-Step Fluorocarbon Plasma Treatment -- 5.1.1 Structural Design and Fabrication -- 5.1.2 Triboelectric Mechanism Analysis Based on DFT Calculations -- 5.1.3 Effect of Fluorocarbon Plasma Treatment on Output Performance of TENG -- 5.1.4 Reliability of Fluorocarbon Plasma Treatment for Enhancing TENG -- 5.1.5 The Performance Enhancement Analysis -- 5.2 Enhancement of TENG Based on Hierarchical Structures -- 5.2.1 Enhancement of TENG Based on Micro-Nanohierarchical Structures -- 5.2.2 Enhancement of TENG Based on Hybrid Mechanisms -- 5.3 Applications of TENG for Biomedical Microsystems -- 5.3.1 Application of TENG for Driving Neural Prosthesis In Vitro
  • 5.3.2 Application of TENG for Driving Neural Prosthesis In Vivo -- 5.4 Applications of TENG in the Other Fields -- 5.4.1 Self-Powered Humidity Monitoring Sensor -- 5.4.2 Application for Portable Electronics -- 5.5 Conclusions -- References -- 6 Summary and Perspectives -- 6.1 Summary -- 6.2 Main Contribution -- 6.3 Perspectives -- Reference
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http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b4391113'}
Extent
1 online resource (137 pages)
Form of item
online
Isbn
9783662488164
Media category
computer
Media MARC source
rdamedia
Media type code
c
Sound
unknown sound
Specific material designation
remote

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