Coverart for item
The Resource Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California, Bhanwar Singh, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California, Bhanwar Singh, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Label
Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California
Title
Metrology, inspection, and process control for microlithography XIII
Title remainder
15-18 March, 1999, Santa Clara, California
Statement of responsibility
Bhanwar Singh, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series
Series volume
v. 3677
Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California, Bhanwar Singh, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Label
Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California, Bhanwar Singh, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Publication
Related Contributor
Related Location
Related Agents
Related Authorities
Related Subjects
Related Items
Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819431516&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1389231'}
Extent
2 v. (xv, 1052 p.)
Isbn
9780819431516
Lccn
00697933
Other physical details
ill.

Library Locations

    • Folsom LibraryBorrow it
      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
Processing Feedback ...