Coverart for item
The Resource Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose, USA, Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose, USA, Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

Label
Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose, USA
Title
Metrology-based control for micro-manufacturing
Title remainder
24-25 January 2001, San Jose, USA
Statement of responsibility
Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Title variation
Metrology based control for micro manufacturing
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series
Series volume
v. 4275
Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose, USA, Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Label
Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose, USA, Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Publication
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819439536&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1397981'}
Extent
vii, 156 p.
Isbn
9780819439536
Other physical details
ill.

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