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The Resource Materials for microlithography : radiation-sensitive polymers, L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Frechet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984

Materials for microlithography : radiation-sensitive polymers, L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Frechet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984

Label
Materials for microlithography : radiation-sensitive polymers
Title
Materials for microlithography
Title remainder
radiation-sensitive polymers
Statement of responsibility
L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Frechet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
Title variation
Radiation-sensitive polymers
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Subject
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Series statement
ACS symposium series,
Series volume
266
Materials for microlithography : radiation-sensitive polymers, L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Frechet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
Label
Materials for microlithography : radiation-sensitive polymers, L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Frechet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
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Bibliography note
Includes bibliographies and indexes
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Dimensions
24 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1133003'}
Extent
viii, 494 p.
Isbn
9780841208711
Lccn
84-21744
Other physical details
ill.

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