Coverart for item
The Resource Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California, Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]

Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California, Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]

Label
Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California
Title
Materials and device characterization in micromachining
Title remainder
21-22 September, 1998, Santa Clara, California
Statement of responsibility
Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
LHL
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
Series statement
SPIE proceedings series ; v. 3512
Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California, Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]
Label
Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California, Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819429711&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1355948'}
Extent
xi, 442 p.
Isbn
9780819429711
Other physical details
ill.

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