Coverart for item
The Resource MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)

MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)

Label
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
Title
MOEMS and miniaturized systems III
Title remainder
27-29 January 2003, San Jose, California, USA
Statement of responsibility
James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
Title variation
Microelectromechanical systems and miniaturized systems III
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series,
Series volume
v. 4983
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
Label
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819447838&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1478360'}
Extent
xlvi, 368 p.
Isbn
9780819447838
Other physical details
ill. (some col.)

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