Coverart for item
The Resource MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA, Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA, Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

Label
MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA
Title
MEMS components and applications for industry, automobiles, aerospace, and communication II
Title remainder
28-29 January 2003, San Jose, California, USA
Statement of responsibility
Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
CUS
Index
index present
Literary form
non fiction
Series statement
SPIE proceedings series,
Series volume
v. 4981
MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA, Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Label
MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA, Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
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Bibliography note
Includes bibliographical references and author index
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780819447814&userID=ebsco-test&password=ebsco-test
Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1478358'}
Extent
xliv, 248 p.
Isbn
9780819447814
Other physical details
ill.

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