Coverart for item
The Resource Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties, Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo, (electronic resource)

Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties, Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo, (electronic resource)

Label
Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties
Title
Low-k nanoporous interdielectrics
Title remainder
materials, thin film fabrications, structures and properties
Statement of responsibility
Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
MiAaPQ
Illustrations
  • illustrations
  • charts
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
Nanotechnology science and technology
Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties, Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo, (electronic resource)
Label
Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties, Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo, (electronic resource)
Link
http://libproxy.rpi.edu/login?url=https://ebookcentral.proquest.com/lib/connectny/detail.action?docID=3019998
Publication
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Bibliography note
Includes bibliographical references (p. [51]-61) and index
Color
multicolored
Dimensions
unknown
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b4093237'}
Extent
67 p.
Form of item
  • online
  • electronic
Other physical details
ill.
Reproduction note
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Specific material designation
remote

Library Locations

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