Coverart for item
The Resource Lasers in microlithography : 2-3 March 1987, Santa Clara, California, Daniel J. Ehrlich, (Jeffrey Y. Tsao, John Samuel Batchelder), chair(s)/editor(s) ; sponsored by SPIE--The International Society of Optical Engineering

Lasers in microlithography : 2-3 March 1987, Santa Clara, California, Daniel J. Ehrlich, (Jeffrey Y. Tsao, John Samuel Batchelder), chair(s)/editor(s) ; sponsored by SPIE--The International Society of Optical Engineering

Label
Lasers in microlithography : 2-3 March 1987, Santa Clara, California
Title
Lasers in microlithography
Title remainder
2-3 March 1987, Santa Clara, California
Statement of responsibility
Daniel J. Ehrlich, (Jeffrey Y. Tsao, John Samuel Batchelder), chair(s)/editor(s) ; sponsored by SPIE--The International Society of Optical Engineering
Contributor
Subject
Genre
Member of
Series statement
Proceedings of SPIE--the International Society for Optical Engineering
Series volume
v. 774
Lasers in microlithography : 2-3 March 1987, Santa Clara, California, Daniel J. Ehrlich, (Jeffrey Y. Tsao, John Samuel Batchelder), chair(s)/editor(s) ; sponsored by SPIE--The International Society of Optical Engineering
Label
Lasers in microlithography : 2-3 March 1987, Santa Clara, California, Daniel J. Ehrlich, (Jeffrey Y. Tsao, John Samuel Batchelder), chair(s)/editor(s) ; sponsored by SPIE--The International Society of Optical Engineering
Publication
Note
  • Errata slip inserted
  • P. iv also printed on verso of p. v
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Bibliography note
Includes bibliographies and author index
http://library.link/vocab/cover_art
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1167005'}
Extent
v, 192 p.
Isbn
9780892528097
Lccn
87-60742
Other physical details
ill.

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