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The Resource Investigations of the low-dielectric-constant fluorinated polyimide for use as the interlayer dielectric in ULSI

Investigations of the low-dielectric-constant fluorinated polyimide for use as the interlayer dielectric in ULSI

Label
Investigations of the low-dielectric-constant fluorinated polyimide for use as the interlayer dielectric in ULSI
Title
Investigations of the low-dielectric-constant fluorinated polyimide for use as the interlayer dielectric in ULSI
Creator
Contributor
Dissertation note
Thesis (Ph.D.)--Rensselaer Polytechnic Institute, Dec. 1996.
Investigations of the low-dielectric-constant fluorinated polyimide for use as the interlayer dielectric in ULSI
Label
Investigations of the low-dielectric-constant fluorinated polyimide for use as the interlayer dielectric in ULSI
Publication
Related Contributor
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1340056'}
Extent
xx, 170 p.
Other physical details
ill.

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