Coverart for item
The Resource Introduction to microlithography : theory, materials, and processing, Larry F. Thompson, editor, C. G. Willson, editor, M. J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

Introduction to microlithography : theory, materials, and processing, Larry F. Thompson, editor, C. G. Willson, editor, M. J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

Label
Introduction to microlithography : theory, materials, and processing
Title
Introduction to microlithography
Title remainder
theory, materials, and processing
Statement of responsibility
Larry F. Thompson, editor, C. G. Willson, editor, M. J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
Contributor
Subject
Genre
Member of
Series statement
ACS symposium series,
Series volume
219
Introduction to microlithography : theory, materials, and processing, Larry F. Thompson, editor, C. G. Willson, editor, M. J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
Label
Introduction to microlithography : theory, materials, and processing, Larry F. Thompson, editor, C. G. Willson, editor, M. J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
Publication
Related Contributor
Related Location
Related Agents
Related Authorities
Related Subjects
Related Items
Bibliography note
Includes bibliographies and index
Contents
An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin
http://library.link/vocab/cover_art
https://contentcafe2.btol.com/ContentCafe/Jacket.aspx?Return=1&Type=S&Value=9780841207752&userID=ebsco-test&password=ebsco-test
Dimensions
24 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1103111'}
Extent
ix, 363 p.
Isbn
9780841207752
Lccn
83-5968
Other physical details
ill.

Library Locations

    • Folsom LibraryBorrow it
      110 8th St, Troy, NY, 12180, US
      42.729766 -73.682577
Processing Feedback ...