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The Resource Integrated circuit metrology, inspection, and process control : 4-6 March 1987, Santa Clara, California, Kevin M. Monahan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering

Integrated circuit metrology, inspection, and process control : 4-6 March 1987, Santa Clara, California, Kevin M. Monahan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering

Label
Integrated circuit metrology, inspection, and process control : 4-6 March 1987, Santa Clara, California
Title
Integrated circuit metrology, inspection, and process control
Title remainder
4-6 March 1987, Santa Clara, California
Statement of responsibility
Kevin M. Monahan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering
Contributor
Subject
Genre
Member of
Series statement
Proceedings of SPIE--the International Society for Optical Engineering
Series volume
v. 775
Integrated circuit metrology, inspection, and process control : 4-6 March 1987, Santa Clara, California, Kevin M. Monahan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering
Label
Integrated circuit metrology, inspection, and process control : 4-6 March 1987, Santa Clara, California, Kevin M. Monahan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering
Publication
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Bibliography note
Includes bibliographical references and index
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Dimensions
28 cm.
http://library.link/vocab/discovery_link
{'f': 'http://opac.lib.rpi.edu/record=b1163899'}
Extent
vi, 329 p.
Isbn
9780892528103
Isbn Type
(pbk.)
Lccn
87-60743
Other physical details
ill.

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