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The Resource Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California, Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California, Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Label
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California
Title
Integrated circuit metrology, inspection, and process control IX
Title remainder
20-22 February 1995, Santa Clara, California
Statement of responsibility
Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
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Subject
Genre
Member of
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
v. 2439
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California, Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Label
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California, Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Publication
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Bibliography note
Includes bibliographical references and author index
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Dimensions
28 cm.
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{'f': 'http://opac.lib.rpi.edu/record=b1261558'}
Extent
xi, 514 p.
Isbn
9780819417879
Isbn Type
(pbk.)
Lccn
94-69902
Other physical details
ill.

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